D07-15 Mass Flow Controller

Features

• High steady flow type
• Small size, low volatility
• Rubber-sealed, analog-circuit MFC
• Adopt P20 gold finger plug

D07-15 is a thermal mass flowmeter. The mass flow controller can be used to measure and control various gases. Besides the measurement, it can also precisely control the mass flow of the gas. The mass flowmeter (MFM) can precisely measure the quality of the gas flow. D07-15 is a high steady flow type product specially developed by Seven star flowmeter to meet the needs of customers for flow stability.

 

SPECIFICATION

Item

D07-15

D07-15A

Ranges of Flow

( 0~5,10,20,30,50,100,200,300,500) SCCM
( 0~1,2,3,5) SLM

Accuracy

±1% F.S.

Linearity

±0.5% F.S.

Repeatability

±0.2% F.S.

Response-Time (0~100%)

≤4 sec

Operation Pressure range

(0.1 ~ 0.3) MPa

Max.Operation Pressure

0.5

Pressure drop

3 MPa

Operation Temperature

5 ℃ ~ 45 ℃

Input/Output Signal

0 V ~ +5.00 V(Input Resistance > 100K, Output Electric Current ≤3mA)

Power Supply

+15V  50mA
-15V  200mA

Weight

0.85 kg

0.9 kg