D07-19 mass flow controller meter(M.F.C controller)

 FEATURES

• High precision, fast response type
• Rubber-sealed, analog-circuit MFC
• Adopt DB15 electrical plug, international standard mechanical connector
• International compatibility

APPLICATION 

Mass Flow Meter (MFM) accurately measures mass flow rates, Mass Flow Controller (MFC) accurately measures and controls mass flow rates despites gas volume fluctuated due to pressure or temperature changes. Which is widely applied in the fields as: semiconductor and IC fabrication, special materials science, chemical industry, petrolic industry, pharmaceutical industry, environmental protecting and vacuum system researching, etc.. The typical applications include: microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma etching, sputtering, ion implantation; vacuum deposition equipment, optical fiber melting, micro-reaction equipment, mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments. D07 series MFM & MFC bring the high accuracy, excellent repeatability, quick response, soft-start, better reliability, wide variety ranges of operation pressure (good operation in high pressure and vacuum situations), simple convenient operation, flexible installation, possible connecting with PC to carry out automatic control to the users’ system. D07 series better is connected together with D08 series Readout Boxes.

SPECIFICATION

Item

D07-19B

D07-19BM

D07-19F

D07-19FM 型

Ranges of Flow

(0~5,10,20,30,50,100,200,300,500) SCCM

(0~5,10,20,30,50,100,200,300,500) SCCM

(0~5,10,20,30,50,100,200,300,500) SCCM

(0~5,10,20,30,50,100,200,300,500) SCCM

( 0~1,2,3,5,10,20,30) SLM

( 0~1,2,3,5,10,20,30) SLM

( 0~1,2,3,5,10,20,30) SLM

(0~1,2,3,5,10,20,30) SLM

Accuracy

±1 % F.S. (20,30SLM: ±2 % F.S.)

±1 % F.S. (20,30SLM: ±2 % F.S.)

±1 % F.S. (20,30SLM: ±2 % F.S.)

±1% F.S. (20,30SLM: ±2 % F.S.)

Linearity

±0.5 % F.S. (20,30SLM: ±2 % F.S.)

±0.5 % F.S. (20,30SLM: ±2 % F.S.)

±0.5 % F.S. (20,30SLM: ±2 % F.S.)

±0.5% F.S. (20,30SLM: ±2% F.S.)

Repeatability

±0.2 % F.S.

±0.2 % F.S.

±0.2 % F.S.

±0.2 % F.S.

Response-Time (0~100%)

≤2 sec

≤2sec

≤4 sec

≤4 sec

Operation Pressure range

≤10SLM: 0.1 ~ 0.5 MPa (14.5~72.5 psid)
>10SLM: 0.1~ 0.3 MPa (14.5~43.5 psid)

≤10SLM: 0.1 ~ 0.5 MPa (14.5~72.5 psid)
>10SLM: 0.1~ 0.3 MPa (14.5~43.5 psid)

Pressure drop

<0.02 MPa (2.9 psid)

<0.02 MPa (2.9 psid)

Max.operation Pressure

1 MPa

1 MPa

1 MPa

1 MPa

Max Pressure

3 MPa (435.1 psig)

10 MPa (1450.4 psig)

3 MPa (435.1 psig)

10 MPa (1450.4 psig)

Operation Temperature

5 ℃ ~ 45 ℃

5 ℃ ~ 45 ℃

5 ℃ ~ 45 ℃

5 ℃ ~ 45 ℃

Input/Output Signal

0 V ~ +5.00 V
(Input Resistance > 100K, Output Electric Current ≤3mA)

0 V ~ +5.00 V
(Input Resistance > 100K, Output Electric Current ≤3mA)

4~20 mA or 1~5 VDC

4~20 mA or 1~5 VDC

Power Supply

+15 V  50 mA
-15V  200 mA

+15 V  50 mA
-15 V  50 mA

24 VDC  100 mA

24 VDC  100 mA

Weight

0.95 kg

0.7 kg

1.2 kg

1 Kg