D07-23 Mass Flow Controllers & Flow Meters

Features

• High flow type
• Tubular shunt, not easy to block
• Auto-off function. When the flow is less than or equal to 2%F.S., it will automatically shut down

D07-23F is a thermal mass flow meter. The mass flow controller can be applied to measure and control various gases. Besides the measurement, it can also precisely control the mass flow of the gas. The mass flow meter (MFM) can precisely measure the quality of the gas flow. The D07-23F product is an analog product developed by Sevenstar Flowmeter with high precision and fast response time.

 

SPECIFICATION

                    Item

D07-23F 

D07-23FM 

Ranges of Flow

0~20,30,50,100,150,200,250 SLM

0~20,30,50,100,150,200,250 SLM

Accuracy

±1.5% F.S.

±1.5 % F.S.

Linearity

±1% F.S.

±1 % F.S.

Repeatability

±0.2% F.S.

±0.2 % F.S.

Response-Time (0~100%)

≤ 3sec

≤3 sec

Operation Pressure Range

20,30 SLM: (0.05~0.30) MPa (7.3~43.5 psid)
50~150 SLM: (0.10~0.30) MPa (14.5~43.5 psid)
200,250 SLM: (0.15~0.30) MPa (21.8~43.5 psid)

Pressure drop

20~100SLM: <0.02 MPa (2.9 psid)
>100SLM: <0.05 MPa (7.3 psid)

Max.operation Pressure

1 MPa

1 MPa

Max Pressure

3 MPa (435.1 psig)

3 MPa (435.1 psig)

Temperature Coefficient

Zero: ≤±0.1% F.S./℃;
Span: ≤±0.2% F.S./℃;

Zero: ≤±0.1% F.S./℃;
Span: ≤±0.2% F.S./℃;

Operation Temperature

5℃ ~ 45℃

5 ℃ ~ 45 ℃

Input/Output Signal

4~20 mA or 1~5 VDC

4~20 mA or 1~5 VDC

Power Supply

24VDC 400 mA

24 VDC 100 mA

Weight

2.6 kg

1.5 kg