D07-7 gas mass flow controller for pvd machine

Features

• Rubber-sealed, analog-circuit MFC

• Tubular shunt for long service life

APPLICATION 

Mass Flow Meter (MFM) accurately measures mass flow rates, Mass Flow Controller (MFC) accurately measures and controls mass flow rates despites gas volume fluctuated due to pressure or temperature changes. Which is widely applied in the fields as: semiconductor and IC fabrication, special materials science, chemical industry, petrolic industry, pharmaceutical industry, environmental protecting and vacuum system researching, etc.. The typical applications include: microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma etching, sputtering, ion implantation; vacuum deposition equipment, optical fiber melting, micro-reaction equipment, mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments. D07 series MFM & MFC bring the high accuracy, excellent repeatability, quick response, soft-start, better reliability, wide variety ranges of operation pressure (good operation in high pressure and vacuum situations), simple convenient operation, flexible installation, possible connecting with PC to carry out automatic control to the users’ system. D07 series better is connected together with D08 series Readout Boxes.

  SPECIFICATION

 

No.

Item

D07-7K

D07-7B

D07-7C

D07-7CM

 

1

Ranges of Flow

(20,30,50,100,200,300,500)  SCCM

( 0~1,2,3,5,10)  SLM

(0~5,10,20,30,50,100,200,300,500)  SCCM

( 0~1,2,3,5,10)  SLM

(0~5,10,20,30,50,100,200,300,500)  SCCM

( 0~1,2,3,5,10)  SLM

(0~5,10,20,30,50,100,200,300,500)  SCCM

( 0~1,2,3,5,10)  SLM

2

Accuracy

±1 % F.S

±1.5  % F.S

±1.5  % F.S

±1.5  % F.S

3

Linearity

±1 % F.S

±1 % F.S

±1 % F.S

±1 % F.S

4

Repeatability

 ±0.2  %F.S

±0.2  %F.S

±0.2  %F.S

±0.2 %F.S

5

Response-Time (0~100%)

Electronic characteristic: 10 sec;

Gas characteristic:  ≤ 4  sec

Electronic characteristic: 10 sec;

Gas characteristic:  ≤ 4  sec

Electronic characteristic: 10 sec;

Gas characteristic:  ≤ 4  sec

 10  sec

6

Pressure drop

ˉ

ˉ

ˉ

<0.01 MPa

7

Operation Pressure range

(0.1 ~ 0.5)  MPa

(0.1 ~ 0.5)  MPa

(0.1 ~ 0.5)  MPa

<0.01 MPa

8

Temperature Coefficient

Zero:≤±0.1% F.S./℃;

Span: ≤±0.2% F.S./℃;

ˉ

ˉ

ˉ

9

Max.Operation Pressure

1  MPa

1  MPa

1  MPa

1  MPa

10

Max. Pressure

3  MPa

3  MPa

3  MPa

3  MPa

11

Operation Temperature

5 ℃ ~ 45 ℃

5 ℃ ~ 45 ℃

5 ℃ ~ 45 ℃

5 ℃ ~ 45 ℃

12

Input/Output Signal

0 V ~ +5.00 V
(Input Resistance > 100K, Output Electric Current ≤3mA)

0 V ~ +5.00 V
((Input Resistance > 100K, Output Electric Current ≤3mA)

0 V ~ +5.00 V
(Input Resistance > 100K, Output Electric Current ≤3mA)

0 V ~ +5.00 V
(Input Resistance > 100K, Output Electric Current ≤3mA)

13

Power Supply

  +15 V   50 mA;

  -15V  200 mA

    +15 V   50 mA;

 -15V  200 mA

      +15 V   50 mA;

   -15V  200 mA

+15 V   50 mA

-15 V   50 mA

14

Weight

1.1  kg

1.1  kg

1.1  kg

0.92  kg