D07-9 gas mass flow meter for vacuum system

FEATURES

• Medium flow type
• Rubber-sealed, analog-circuit MFC
• Diverters are less prone to clogging
• Adopt DB15 electrical plug, international standard mechanical connector

D07-9 is a thermal mass flowmeter. The mass flow controller can be applied to measure and control various gases. Besides the measurement, it can also precisely control the mass flow of the gas. The mass flowmeter (MFM) can precisely measure the quality of the gas flow. The D07-9 M.F.C is an analog product developed by SEVENSTAR Flowmeter with high precision and fast response time.

 

SPECIFICATION

Item

D07-9E 

D07-9EM 

D07-9F 

D07-9FM 

Ranges of Flow

(0~20,30,50,100,150,200,250) SLM

(0~20,30,50,100,150,200,250) SLM

(0~20,30,50,100,150,200,250 )SLM

(0~20,30,50,100,150,200,250) SLM

Accuracy

±2 % F.S.

±2 % F.S.

±2% F.S.

±2 % F.S.

Linearity

±1 % F.S.

±1 % F.S.

±1% F.S.

±1 % F.S.

Repeatability

±0.2 % F.S.

±0.2 % F.S.

±0.2% F.S.

±0.2 % F.S.

Response-Time (0~100%)

(1 ~ 4) sec

(1 ~ 4) sec

≤ 4sec

≤4 sec

Operation Pressure range

20 , 30  SLM:   (0.05 ~ 0.30)  MPa (7.3~43.5 psid)
50,150  SLM:   (0.10 ~ 0.30)  MPa (14.5~43.5 psid)
200,250  SLM:   (0.15 ~ 0.30)  MPa (21.8~43.5 psid)

20,30  SLM: (0.05~0.30) MPa  (7.3~43.5 psid)
50~150 SLM: (0.10~0.30) MPa  (14.5~43.5 psid)
200,250 SLM: (0.15~0.30) MPa  (21.8~43.5 psid)

Pressure drop

20~100SLM: <0.02 MPa (2.9 psid);
>100SLM: <0.05 MPa (7.3 psid)

20~100SLM: <0.02 MPa  (2.9 psid);
>100SLM: <0.05 MPa    (7.3 psid)

Max.Operation Pressure

1 MPa

1 MPa

1 MPa

1 MPa

Max Pressure

3 MPa (435.1 psig)

3  MPa (435.1 psig)

3  MPa  (435.1 psig)

3  MPa    (435.1 psig)

Operation Temperature

5 ℃ ~ 45 ℃

5 ℃ ~ 45 ℃

5℃ ~ 45℃

5 ℃ ~ 45 ℃

Input/Output Signal

0 V ~ +5.00 V
(Input Resistance > 100K, Output Electric Current ≤3mA)

0 V ~ +5.00 V
(Input Resistance > 100K, Output Electric Current ≤3mA)

4~20 mA or 1~5 VDC

4~20 mA or 1~5 VDC

Power Supply

+15 V   50 mA
-15V  400 mA

+15 V   50 mA
-15 V   50 mA

24VDC  400 mA

24 VDC   100 mA

Weight

2.6 kg

1.5 kg

2.6 kg

1.5 kg